✦ LIBER ✦
The computer modelling of SIMS sputter depth profiling and high fluence, low energy ion implantation using the IMPETUS code: J A van den Berg∗, D G Armour∗, R Badhekau†, M Wadsworth‡ and C R Whitehouse,‡∗Department of Electronic and Electrical Engineering, † Department of Mathematics and Computer Science, University of Salford, Salford M5 4WT, UK, ‡ RSRE, Malvern, Worcs WR14 3 PS, UK
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 133 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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