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The design and fabrication of a magnetically actuated micromachined flow valve

โœ Scribed by R.L. Smith; R.W. Bower; S.D. Collins

Book ID
108027999
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
488 KB
Volume
24
Category
Article
ISSN
0924-4247

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Design and fabrication of a new micromac
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In this paper, a new micromachined interdigital coplanar waveguide (CPW) structure has been developed and its characteristics have been studied as a function of transmission line parameters. In interdigital CPW, the ground conductor is thickened by micromachining techniques which is helpful for redu