๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Development of a micromachining process for the fabrication of a superconductor magnetic-field sensor

โœ Scribed by A. Natarajan; W. Wang; E. Ma; R. N. Bhattacharya; R. D. Blaugher

Publisher
Springer-Verlag
Year
1999
Tongue
English
Weight
374 KB
Volume
6
Category
Article
ISSN
0946-7076

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Development of a two-dimensional strip r
Development of a two-dimensional strip radiation sensor fabricated with normal silicon processes
โœ Naoyuki Sawamoto; Yasushi Fukazawa; Takashi Ohsugi; Hiroshi Ohyama; Hiro Tajima; ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 391 KB

A two-dimensional readout micro-strip sensor processed with single-sided silicon processes has been designed and fabricated. Both p + (X) and n + (Y) electrodes are placed on one side. The n + electrode is surrounded with the p + strips to make isolation of each n + electrode. The test chip was fabr