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Simulation and verification of a piezoelectrically actuated diaphragm for check valve micropump design

โœ Scribed by Jianke Kang; Gregory W. Auner


Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
727 KB
Volume
167
Category
Article
ISSN
0924-4247

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โœ Shumin Zhang; Wansheng Su; Mona Zaghloul ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 455 KB

The design, modeling, and optimization of a novel, thermally actuated CMOS-MEMS switch are presented in this article. This series capacitive MEMS switch solves the substrate loss and down-state capacitance degradation problems commonly plaguing MEMS switches. The switch uses finger structure for cap