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The decomposition of trumethylgallium, triethylgallium and trimethylaluminum on Si(100)

✍ Scribed by T.R Gow; F Lee; R Lin; A.L Backman; R.I Masel

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 329 KB
Volume: 41
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(90)93831-3

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