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Surface studies of the thermal decomposition of triethylgallium on GaAs (100)

✍ Scribed by A.J. Murrell; A.T.S. Wee; D.H. Fairbrother; N.K. Singh; J.S. Foord; G.J. Davies; D.A. Andrews


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
323 KB
Volume
105
Category
Article
ISSN
0022-0248

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The thermal decomposition of surface oxides formed during the low pressure oxidation of Graphon was studied. Oxidation reactions were performed at 525", 575" and 625Β°C in a static reactor, using initial 0, pressures between 10 and 200 mtorr. The amount of surface oxide formed was found to increase w