The application of porous silicon interference filters in optical sensors
✍ Scribed by S Hilbrich; R Arens-Fischer; L Küpper; W Theiß; M.G Berger; M Krüger; M Thönissen
- Book ID
- 108389018
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 419 KB
- Volume
- 297
- Category
- Article
- ISSN
- 0040-6090
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## Abstract Porous silicon multilayer formation was observed by in situ monitoring of the reflectivity spectra in the visible range. In order to reproduce the formation process optical model simulation was carried out. For demonstration of this method a 24‐layer microcavity structure was selected.
## Abstract The process of making laterally graded interference filters has been reanalyzed. A simple and consistent picture arises if one applies a constant electric field perpendicular to the etch current instead of a constant current. The system is quantitatively modeled by means of a pure ohmic