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Silicon nitride films: Optical properties and possibility of applications in multilayer interference systems

✍ Scribed by A. I. Usoskin; O. A. Popova


Publisher
Springer US
Year
1985
Tongue
English
Weight
361 KB
Volume
43
Category
Article
ISSN
0021-9037

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Optical and structural properties of sil
✍ Shih-Liang Ku; Cheng-Chung Lee πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 484 KB

Silicon nitride (SiN x ) films were prepared by ion-assisted deposition process. The films were analyzed by measurement of scanning electron microscopy (SEM), Fourier transform infrared spectrometry (FTIR), Xray photoelectron spectrometry, spectrophotometer, and ellipsometer measurements. The effect