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Wedge-shaped layers from porous silicon: the basics of laterally graded interference filters

✍ Scribed by Bohn, H. G. ;Marso, M.


Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
238 KB
Volume
202
Category
Article
ISSN
0031-8965

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✦ Synopsis


Abstract

The process of making laterally graded interference filters has been reanalyzed. A simple and consistent picture arises if one applies a constant electric field perpendicular to the etch current instead of a constant current. The system is quantitatively modeled by means of a pure ohmic equivalent circuit model. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)