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In situ observation of the evolution of porous silicon interference filter characteristics

✍ Scribed by Volk, J. ;Ferencz, K. ;Ramsden, J. J. ;Tóth, A. L. ;Bársony, I.

Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
171 KB
Volume
202
Category
Article
ISSN
0031-8965

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✦ Synopsis

Abstract

Porous silicon multilayer formation was observed by in situ monitoring of the reflectivity spectra in the visible range. In order to reproduce the formation process optical model simulation was carried out. For demonstration of this method a 24‐layer microcavity structure was selected. Although in this low wavelengths region some absorption and scattering effects complicate the overall picture, the combined analysis throws new light upon the evolution of the porous silicon multilayer. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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## Abstract The process of making laterally graded interference filters has been reanalyzed. A simple and consistent picture arises if one applies a constant electric field perpendicular to the etch current instead of a constant current. The system is quantitatively modeled by means of a pure ohmic