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The affinity of Si–N and Si–C bonding in amorphous silicon carbon nitride (a-SiCN) thin film

✍ Scribed by Chen, C.W.; Huang, C.C.; Lin, Y.Y.; Chen, L.C.; Chen, K.H.

Book ID: 120246464
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 405 KB
Volume: 14
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2004.10.045

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