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Tensile testing of microfabricated thin films

โœ Scribed by H. Ogawa; K. Suzuki; S. Kaneko; Y. Nakano; Y. Ishikawa; T. Kitahara


Book ID
106186275
Publisher
Springer-Verlag
Year
1997
Tongue
English
Weight
706 KB
Volume
3
Category
Article
ISSN
0946-7076

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Thin-film technology provides definite advantages for producing small-dimension electrodes and electrochemical transducers. The aim of this review article is to describe the main technological steps of microfabrication. Three selected examples, derived from research in our laboratory, are used to il