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Microfabrication of magnetic thin-film heads

โœ Scribed by D. Stephani


Book ID
103598055
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
131 KB
Volume
9
Category
Article
ISSN
0167-9317

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Thin-film technology provides definite advantages for producing small-dimension electrodes and electrochemical transducers. The aim of this review article is to describe the main technological steps of microfabrication. Three selected examples, derived from research in our laboratory, are used to il