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Temperature effects of Si interface passivation layer deposition on high-k III-V metal-oxide-semiconductor characteristics

โœ Scribed by Ok, InJo; Kim, H.; Zhang, M.; Zhu, F.; Park, S.; Yum, J.; Zhao, H.; Lee, Jack C.


Book ID
127375546
Publisher
American Institute of Physics
Year
2007
Tongue
English
Weight
384 KB
Volume
91
Category
Article
ISSN
0003-6951

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