✦ LIBER ✦

Target material pathways model for high power pulsed magnetron sputtering

✍ Scribed by Christie, D. J.

Book ID: 121753893
Publisher: AVS (American Vacuum Society)
Year: 2005
Tongue: English
Weight: 334 KB
Volume: 23
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.1865133

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