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Synthesis of transparent and hard SiOC(−H) thin films on polycarbonate substrates by PECVD method

✍ Scribed by Mayui Noborisaka; Hideyuki Kodama; So Nagashima; Akira Shirakura; Takahiro Horiuchi; Tetsuya Suzuki

No coin nor oath required. For personal study only.

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