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[IEEE 2012 IEEE Symposium on Humanities, Science and Engineering Research (SHUSER) - Kuala Lumpur (2012.06.24-2012.06.27)] 2012 IEEE Symposium on Humanities, Science and Engineering Research - Deposition temperature dependence of the sputtered nanocrystalline silicon thin films on Teflon substrates deposited by RF magnetron sputtering method

✍ Scribed by Mahzan, N. H.; Hashim, S. B.; Herman, S. H.; Noor, U. M.; Rusop, M.

Book ID: 125487604
Publisher: IEEE
Year: 2012
Weight: 892 KB
Category: Article
ISBN: 1467313092
DOI: 10.1109/SHUSER.2012.6269003

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