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Synthesis of methyl boron nitride film as low-k insulating film for LSI interconnection

✍ Scribed by Aoki, Hidemitsu; Tokuyama, Shinji; Masuzumi, Takuro; Hara, Makoto; Mazumder, Motaharu Kabir; Watanabe, Daisuke; Kimura, Chiharu; Sugino, Takashi

Book ID: 122561965
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 577 KB
Volume: 18
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2009.01.012

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