Synthesis of cubic boron nitride films on Si tips via chemical vapor deposition and the field emission properties

✍ Scribed by Kobayashi, Masanori; Miyashita, Hidetoshi; Inomata, Naoki; Ono, Takahito

• Book ID: 125442357
• Publisher: AVS (American Vacuum Society)
• Year: 2014
• Tongue: English
• Weight: 953 KB
• Volume: 32
• Category: Article
• ISSN: 1520-8567
• DOI: 10.1116/1.4843075