The Mechanism of Chemical Vapor Deposition of Cubic Boron Nitride Films from Fluorine-Containing Species

✍ Scribed by W. J. Zhang; C. Y. Chan; X. M. Meng; M. K. Fung; I. Bello; Y. Lifshitz; S. T. Lee; X. Jiang

• Publisher: John Wiley and Sons
• Year: 2005
• Tongue: English
• Weight: 365 KB
• Volume: 44
• Category: Article
• ISSN: 0044-8249
• DOI: 10.1002/anie.200500320