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Synthesis of B–C–N thin films by electron beam excited plasma CVD

✍ Scribed by Hasegawa, Takeshi; Yamamoto, Kazuhiro; Kakudate, Yozo


Book ID
120159109
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
268 KB
Volume
11
Category
Article
ISSN
0925-9635

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