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Stress and structural properties of diamond-like carbon films deposited by electron beam excited plasma CVD

โœ Scribed by Ban, Masahito; Hasegawa, Takeshi; Fujii, Sadao; Fujioka, Junzo


Book ID
123094408
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
291 KB
Volume
12
Category
Article
ISSN
0925-9635

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