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Room temperature synthesis of SiO2 thin films by ion beam induced and plasma enhanced CVD

✍ Scribed by A. Barranco; F. Yubero; J.P. Espinós; J. Benı́tez; A.R. González-Elipe; J. Cotrino; J. Allain; T. Girardeau; J.P. Rivière

Book ID: 108422875
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 369 KB
Volume: 142-144
Category: Article
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(01)01101-x

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