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Influence of raw gases on B–C–N films prepared by electron beam excited plasma CVD

✍ Scribed by Hasegawa, Takeshi; Yamamoto, Kazuhiro; Kakudate, Yozo


Book ID
123227111
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
124 KB
Volume
12
Category
Article
ISSN
0925-9635

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