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Synchrotron radiation assistant MOCVD deposition of ZnO films on Si substrate

โœ Scribed by Yang Guangtao; Zhang Guobin; Zhou Hongjun; Qi Zeming


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
440 KB
Volume
255
Category
Article
ISSN
0169-4332

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โœ J.J. Ding; H.X. Chen; S.Y. Ma ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 475 KB

Al-doped ZnO (ZnO:Al) thin films were deposited on Si substrates using the radio-frequency reactive magnetron sputtering technique. Effect of Al contents and annealing treatments on the structural and photoluminescence (PL) properties of ZnO films was investigated. The results showed that crystallin