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Synchronous plasma enhancement in RF-driven plasma source for ion implantation

✍ Scribed by C. Diplasu; A. Surmeian; A. Groza; M. Ganciu

Book ID: 108278547
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 649 KB
Volume: 203
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2009.02.137

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