✦ LIBER ✦

Droplet-free high-density metal ion source for plasma immersion ion implantation

✍ Scribed by Keiji Nakamura; Hiroaki Yoshinaga; Ken Yukimura

Book ID: 103860719
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 120 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.050

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