✦ LIBER ✦

Surface topography of HCl gas-phase etched germanium

✍ Scribed by L. Däweritz

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 778 KB
Volume: 58
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(82)90282-2

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Processes in surface formation of HCl ga

Processes in surface formation of HCl gas-phase etched germanium

✍ L. Däweritz; T. Thieme; D. Hildebrandt; M. Laux 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 711 KB

On batch homogeneity in horizontal CVD r

On batch homogeneity in horizontal CVD reactors (II). HCl gas-phase etching

✍ Dr. F. Richter; Dipl.-Phys. Th. Morgenstern; Dr. R. Sperling 📂 Article 📅 1983 🏛 John Wiley and Sons 🌐 English ⚖ 496 KB

On Batch Homogeneity in Horizontal CVD Reactors (11) HCl Gas-Phase Etching A general model of the depletion is given, to which the reactive component of the reaction gas mixture in a horizontal CVD-reactor is subjected during its flow along the heater. Furthermore the model of heating the process ga

On the origin of deep pit formation for

On the origin of deep pit formation for gas phase HCl etched (111) silicon wafers

✍ K. Tsukamoto; L.J. Giling 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 433 KB

Investigations on the HCl gas-phase etch

Investigations on the HCl gas-phase etching of differently doped and oriented gaas crystals

✍ Dr. S. Dorshchand; Dr. L. Däweritz; Prof. Dr. H. Berger 📂 Article 📅 1983 🏛 John Wiley and Sons 🌐 English ⚖ 567 KB

Gas adsorption and surface charge densit

Gas adsorption and surface charge density of germanium surfaces

✍ M.J. Sparnaaij 📂 Article 📅 1960 🏛 Elsevier Science 🌐 English ⚖ 651 KB

Origin of round smooth pit on CP-4 etche

Origin of round smooth pit on CP-4 etched germanium surfaces

✍ Toshid Abe; Taizo Dhashi 📂 Article 📅 1961 🏛 Elsevier Science ⚖ 220 KB