Investigations on the HCl gas-phase etching of differently doped and oriented gaas crystals

✍ Scribed by Dr. S. Dorshchand; Dr. L. Däweritz; Prof. Dr. H. Berger

• Publisher: John Wiley and Sons
• Year: 1983
• Tongue: English
• Weight: 567 KB
• Volume: 18
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/crat.2170181109