✦ LIBER ✦
7301. Effects of etching with mixture of HCl gas and H2 on the GaAs surface cleaning in molecular-beam epitaxy: J Saito and K Kondo,J Appl Phys, 67, 1990, 6274–6280
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 153 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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