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Surface topography development and ion mixing in the study of depth profiling of multilayered structures

✍ Scribed by A. Galdikas

Book ID
108390533
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
314 KB
Volume
55
Category
Article
ISSN
0042-207X

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Ion beam analysis (IBA) methods were used for the characterization of interdiffusion in thin Au-A1 multilayered systems. Conventional RBS with a high depth resolution at the specimen surface and at the interfaces (e.g. 14 nm in the depth of 255 nm) was used for gold depth profiling. In contrast to g