Influence of ion energy, incidence angle and surface roughness on depth resolution in AES sputter profiling of multilayer Cr/Ni thin films

✍ Scribed by A. Zalar; S. Hofmann

• Book ID: 114168035
• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 311 KB
• Volume: 18
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(86)80105-7