Investigation of Ar incident energy and Ar incident angle effects on surface roughness of Cu metallic thin film in ion assisted deposition

✍ Scribed by Ming-Horng Su; Jian-Ming Lu

• Book ID: 116374563
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 543 KB
• Volume: 38
• Category: Article
• ISSN: 0927-0256
• DOI: 10.1016/j.commatsci.2005.09.014