SIMS depth profiling of Pd/B4C, Ni/C, and Cr/Sc multilayer metal structures using registration of cluster secondary ions: The problem of depth resolution enhancement

✍ Scribed by M. N. Drozdov; Yu. N. Drozdov; M. M. Barysheva; V. N. Polkovnikov; N. I. Chkhalo

• Book ID: 111502086
• Publisher: Allerton Press Inc
• Year: 2011
• Tongue: English
• Weight: 285 KB
• Volume: 75
• Category: Article
• ISSN: 1062-8738
• DOI: 10.3103/s1062873811010096