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Surface structure of Si(001) treated by hydrogen and argon electron cyclotron resonance plasmas

✍ Scribed by M. Diani; J.L. Bischoff; L. Kubler; D. Bolmont


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
581 KB
Volume
62
Category
Article
ISSN
0169-4332

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