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Surface-selective deposition of palladium and silver films from metal-organic precursors: a novel metal-organic chemical vapor deposition redox transmetalation process

✍ Scribed by Lin, Wenbin; Warren, Timothy H.; Nuzzo, Ralph G.; Girolami, Gregory S.


Book ID
120236690
Publisher
American Chemical Society
Year
1993
Tongue
English
Weight
290 KB
Volume
115
Category
Article
ISSN
0002-7863

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