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Preparation of (PB, LA)TIO 3 films by metal organic chemical vapor deposition with new lanthanum precursors

✍ Scribed by Neumayer, D. A.; Purtell, R. J.; Kane, W. F.; Grill, A.

Book ID
127194242
Publisher
Taylor and Francis Group
Year
1997
Tongue
English
Weight
482 KB
Volume
14
Category
Article
ISSN
1058-4587

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Two micrometers thick (Pb, La)(Zr, Ti)O 3 [PLZT] films with wide composition range were epitaxially grown on (1 0 0)SrRuO 3 bottom electrode layers epitaxially grown (1 0 0) SrTiO 3 substrates by metal organic chemical vapor deposition. Constituent phase of the films were found to be almost the same