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Surface segregation and structure of Sb-doped Si(100) films grown at low temperature by molecular beam epitaxy

✍ Scribed by K.D. Hobart; D.J. Godbey; M.E. Twigg; M. Fatemi; P.E. Thompson; D.S. Simons


Book ID
116067330
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
1008 KB
Volume
334
Category
Article
ISSN
0039-6028

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