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Surface roughness of aluminum thin films deposited by effusive and ionized cluster beams

โœ Scribed by L.L. Levenson; A. Yahashi; H. Usui; I. Yamada


Book ID
113204983
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
387 KB
Volume
193-194
Category
Article
ISSN
0040-6090

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