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Molecular dynamics studies of thin film growth by ionized cluster beam deposition

✍ Scribed by Kazumasa Yorizane; Yasunori Yamamura


Book ID
117627372
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
789 KB
Volume
14
Category
Article
ISSN
0927-0256

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Polyimide thin films were deposited by the ionized cluster-beam deposition technique. Imidization and crystallization of polyimide films were investigated using transmission electron microscopy and Fourier transform infrared spectroscopy. Polyimide films deposited under optimum conditions showed a m