Synthesis of crystalline polyimide film by ionized cluster-beam deposition

✍ Scribed by K. W. Kim; S. C. Choi; S. S. Kim; S. J. Cho; C. N. Whang; H. S. Choe; H. J. Jung; D. H. Lee; J. K. Lee

• Book ID: 104740424
• Publisher: Springer
• Year: 1993
• Tongue: English
• Weight: 561 KB
• Volume: 28
• Category: Article
• ISSN: 0022-2461
• DOI: 10.1007/bf00363345

✦ Synopsis

Polyimide thin films were deposited by the ionized cluster-beam deposition technique. Imidization and crystallization of polyimide films were investigated using transmission electron microscopy and Fourier transform infrared spectroscopy. Polyimide films deposited under optimum conditions showed a maximum imidization and good crystal structure, which is superior to that of films fabricated by other techniques.