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Preparation of C60 single crystalline thin film by ionized cluster beam deposition and ion implantation into single crystalline C60 thin film

✍ Scribed by Satoru Isoda; Hiroaki Kawakubo; Satoshi Nishikawa; Osamu Wada


Book ID
113287262
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
443 KB
Volume
112
Category
Article
ISSN
0168-583X

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Preparation of crystalline SiC thin film
✍ G. Derst; S. Kalbitzer; G. KrΓΆtz; G. MΓΌller πŸ“‚ Article πŸ“… 1992 πŸ› Elsevier Science 🌐 English βš– 260 KB

Thin crystalline films of SiC have been produced by ion beam modification of heteroepitaxial silicon thin films on sapphire and by plasma-enhanced chemical vapour deposition on crystalline silicon and sapphire substrates. Both methods yield highly transparent crystalline material. The preparation pr