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Surface Reactions during the Growth of SiO2 Thin Films on Si(100) Using Tetraethoxysilane

✍ Scribed by Danner, J. B.; Vohs, J. M.


Book ID
126172326
Publisher
American Chemical Society
Year
1994
Tongue
English
Weight
820 KB
Volume
10
Category
Article
ISSN
0743-7463

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