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Surface Reaction Mechanisms during Ozone-Based Atomic Layer Deposition of Titanium Dioxide

✍ Scribed by Rai, Vikrant R.; Agarwal, Sumit

Book ID: 125985602
Publisher: American Chemical Society
Year: 2008
Tongue: English
Weight: 82 KB
Volume: 112
Category: Article
ISSN: 1932-7447
DOI: 10.1021/jp8028616

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