Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide

✍ Scribed by Rai, Vikrant R.; Vandalon, Vincent; Agarwal, Sumit

• Book ID: 127134941
• Publisher: American Chemical Society
• Year: 2010
• Tongue: English
• Weight: 886 KB
• Volume: 26
• Category: Article
• ISSN: 0743-7463
• DOI: 10.1021/la101485a