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Surface Modification of Polyimide Films via Plasma-Enhanced Chemical Vapor Deposition of Thin Silica and Nitride Films

✍ Scribed by Li, Hongbin; Sharma, Rajnish K.; Zhang, Yan; Tay, Andrew A. O.; Kang, E. T.; Neoh, K. G.

No coin nor oath required. For personal study only.

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