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Surface chemistry of materials deposition at atomic layer level

✍ Scribed by Tuomo Suntola


Book ID
103619314
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
776 KB
Volume
100-101
Category
Article
ISSN
0169-4332

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Passivation of GaAs surface by atomic-la
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Photoluminescence (PL) intensity and carrier lifetime of TiN coated InGaAs/GaAs NSQW structures are used to indicate the passivation efficiency. Passivation film properties like thickness, mass density and interface roughness are studied by X-ray reflectivity measurements. It is shown that TiN not o