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Initial surface reactions of atomic layer deposition

✍ Scribed by Jiyoung Kim; Tae Wook Kim

Book ID: 107524434
Publisher: The Minerals, Metals & Materials Society
Year: 2009
Tongue: English
Weight: 1002 KB
Volume: 61
Category: Article
ISSN: 1047-4838
DOI: 10.1007/s11837-009-0082-y

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