Surface characterisation and interface studies of high-k materials by XPS and TOF-SIMS
β Scribed by A. Besmehn; A. Scholl; E. Rije; U. Breuer
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 308 KB
- Volume
- 252
- Category
- Article
- ISSN
- 0169-4332
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## Abstract XPS and SIMS have been used to examine the surface composition of copolymers of glycolide (cyclic dimer of glycolic acid) and trimethylene carbonate (TMC) as solventβcast films. XPS results on the polymers agree with bulk composition data. SIMS measurements suggest surface enrichment of
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