✦ LIBER ✦
Effect of RCA cleaning on the surface chemistry of glass and polysilicon films as studied by ToF-SIMS and XPS
✍ Scribed by Onyiriuka, E. C.; Moore, C. B.; Fehlner, F. P.; Binkowski, N. J.; Salamida, D.; King, T-J.; Couillard, J. G.
- Publisher
- John Wiley and Sons
- Year
- 1998
- Tongue
- English
- Weight
- 232 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
The surface chemistry of an alkaline-earth boroaluminosilicate glass is changed by contact with chemical solutions. The present study shows that RCA cleaning creates a silica-rich surface on the glass. This altered surface can be removed by hydroÑuoric acid etching. During the RCA cleaning process, glass components can be transferred to a polysilicon Ðlm placed in the same alkaline solution. The acidic solution in turn removes most of the contamination from the polysilicon.